Originally founded in 2004 as
the European distributor of INUSA, Inc. and Lorex Industries, Inc.,
the POSAS GmbH can offer all kinds of Ozone Equipment:
Generators, Analysers, Destruct Units or complete Ozone
Also we offer Sensor Products to enhance the Overall
Equipment Efficiency (OEE) via Advanced Process
Control (APC) like the Piezocon concentration sensor for
precise precursor delivery, NDIR end point detectors for NF3 cleans,
. and In Situ Wafer Temperature Measurement.
Applied Precision, LLC flow point controllers and upgrades are handled
for Europe too.
Today POSAS is also a specialist for In-line Monitoring
Systems of chemical composition and physical properties of wet processes,
based on IR or UV Technology, for the Semiconductor and Solar Industry.
We are routinely asked to perform technical audits of Precursor
Delivery Systems as well as Dopant Delivery Systems
in the FAB and to issue specific recommendations on
how to improve the performance of installed gas delivery systems
for reaching tighter delivery control of the precursors as required
by more demanding process control, or for implementing a more cost-effective
use of precursor chemicals.
Based on Continuous Wave Cavity Ring-Down Spectroscopy (CW-CRDS),
we offer dedicated trace analyzers and ambient air monitors for
a myriad of species, including moisture, ammonia, methane, oxygen,
hydrogen bromide, hydrogen fluoride, hydrogen chloride, formaldehyde,
and more. The instruments work in a wide range of matrices, including
toxic, corrosive, and hydride gases.
We also offer a new Dopant Mixing and Delivery System (DMDS)
to improve doping concentration control and to
lower the operating cost significantly.